Design of SiN waveguide reference wave source for point diffraction interferometer

Yuankai Chen; Yongying Yang D.D.S.; Chen Wang; Yao Li; Zijian Liang; Hongyang Zhao; Shengan Liu; Jian Bai

doi:10.1117/12.2574760

15 June 2020 Design of SiN waveguide reference wave source for point diffraction interferometer

Yuankai Chen, Yongying Yang D.D.S., Chen Wang, Yao Li, Zijian Liang, Hongyang Zhao, Shengan Liu, Jian Bai

Proceedings Volume 11523, Optical Technology and Measurement for Industrial Applications 2020; 115230F (2020) https://doi.org/10.1117/12.2574760
Event: SPIE Technologies and Applications of Structured Light, 2020, Yokohama, Japan

Abstract

Point diffraction interferometer (PDI) has become the most promising measurement tool since it is firstly proposed by Linnik and its key component used to generate the reference wave can be called as the reference wave source (RWS). A new RWS based on the silicon nitride (SiN) waveguide is now proposed, aimed at providing a spherical reference wave with high NA and high accuracy. Simulation results show that the PV and the RMS of the reference wave generated by the waveguide RWS are 2.86×10^-4λ (λ=532nm) and 4.83×10^-5λ respectively, and the maximum light transmittance of this RWS could reach 24%. In addition, the NA of the reference wave reaches up to 0.58.

Citation Download Citation

Yuankai Chen, Yongying Yang D.D.S., Chen Wang, Yao Li, Zijian Liang, Hongyang Zhao, Shengan Liu, and Jian Bai "Design of SiN waveguide reference wave source for point diffraction interferometer", Proc. SPIE 11523, Optical Technology and Measurement for Industrial Applications 2020, 115230F (15 June 2020); https://doi.org/10.1117/12.2574760

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