Experimental study on rapid fabrication of a 316mm aperture free-form optical mirror

Ling-di Xu; Zhao-ming Wang; Jing Zhao; Ji-you Zhang; Xu Chen

doi:10.1117/12.2580553

5 November 2020 Experimental study on rapid fabrication of a 316mm aperture free-form optical mirror

Ling-di Xu, Zhao-ming Wang, Jing Zhao, Ji-you Zhang, Xu Chen

Proceedings Volume 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing; 1156825 (2020) https://doi.org/10.1117/12.2580553
Event: Applied Optics and Photonics China (AOPC 2020), 2020, Beijing, China

Abstract

To meet the fast and high precision manufacturing requirements of space optical system, experimental research on rapid processing and testing of a 316mm aperture free-form optical mirror was carried out and current fabricating technologies were optimized. In terms of rapid fabrication, process parameters of ultrasonic vibration-assisted grinding were improved firstly, and the method of expending and removing of the optical surface edge based on robot polishing is adopted. In terms of testing, applying scanning white light interferometry (SWLI) technology based on CMM machine to test the surface figure can improve the detection efficiency by more than 10 times when the density of the test point is 100 times higher than point contact CMM testing mode. Finally, the result shows that The accuracy of full-aperture inner surface of free-form surface is better than that of λ/55 RMS. The total time of effective machining and testing of free-form surface is less than 360hrs. The results show that the Optimized process has the advantages of efficiency compared with traditional process and can also achieve high precision at the same time.

Citation Download Citation

Ling-di Xu, Zhao-ming Wang, Jing Zhao, Ji-you Zhang, and Xu Chen "Experimental study on rapid fabrication of a 316mm aperture free-form optical mirror", Proc. SPIE 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing, 1156825 (5 November 2020); https://doi.org/10.1117/12.2580553

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