Presentation
5 March 2021 Fabrication of optical components and micro- and nanofluidic devices in polymers by 172 nm direct photoablation
Author Affiliations +
Abstract
Complex 3D structures having lateral and depth resolutions of <1 µm and 20 nm, respectively, are fabricated in various polymers, including PMMA, ABS, CR-39, and others, by a direct photoablation process utilizing 172 nm radiation from flat microplasma-driven excimer lamps. The developed process does not require any toxic or photosensitive materials, and, therefore, may be performed outside of a clean room. The fabricated 3D structures may also serve as a master mold for PDMS and the curing of other materials.
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrey E. Mironov, Jinhong Kim, Austin W. Steinforth, Sehyun Park, Dane J. Sievers, Sung-Jin Park, and James G. Eden "Fabrication of optical components and micro- and nanofluidic devices in polymers by 172 nm direct photoablation", Proc. SPIE 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV, 116960K (5 March 2021); https://doi.org/10.1117/12.2583254
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KEYWORDS
Polymers

Optical components

Clean room processes

Excimer lasers

Excimers

Lamps

Photosensitive materials

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