Advanced measurement method for PIPBODAF film thickness of Fan out package

Shih-Ping Chang

doi:10.1117/12.2598980

20 June 2021 Advanced measurement method for PIPBODAF film thickness of Fan out package

Shih-Ping Chang

Proceedings Volume 11782, Optical Measurement Systems for Industrial Inspection XII; 117821O (2021) https://doi.org/10.1117/12.2598980
Event: SPIE Optical Metrology, 2021, Online Only

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Shih-Ping Chang "Advanced measurement method for PIPBODAF film thickness of Fan out package", Proc. SPIE 11782, Optical Measurement Systems for Industrial Inspection XII, 117821O (20 June 2021); https://doi.org/10.1117/12.2598980

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