Electrically-switchable foundry-processed phase change photonic devices

Carlos Ríos; Yifei Zhang; Qingyang Du; Cosmin-Constantin Popescu; Mikhail Shalaginov; Paul Miller; Christopher Roberts; Myungkoo Kang; Kathleen Richardson; Sensong An; Clayton Fowler; Hualiang Zhang; Tian Gu; Steven A. Vitale; Juejun Hu

doi:10.1117/12.2592021

1 August 2021 Electrically-switchable foundry-processed phase change photonic devices

Carlos Ríos, Yifei Zhang, Qingyang Du, Cosmin-Constantin Popescu, Mikhail Shalaginov, Paul Miller, Christopher Roberts, Myungkoo Kang, Kathleen Richardson, Sensong An, Clayton Fowler, Hualiang Zhang, Tian Gu, Steven A. Vitale, Juejun Hu

Author Affiliations +

Proceedings Volume 11796, Active Photonic Platforms XIII; 117961Z (2021) https://doi.org/10.1117/12.2592021
Event: SPIE Nanoscience + Engineering, 2021, San Diego, California, United States

Abstract

Optical phase change materials (PCMs) are a unique class of materials which exhibit extraordinarily large optical property change (e.g. refractive index change > 1) when undergoing a solid-state phase transition, and they have witnessed increasing adoption in active integrated photonics and metasurface devices in recent years. Here we report integration of chalcogenide phase change materials in the Lincoln Laboratory 8-inch Si foundry process and the demonstration of electrothermally switched phase-change photonic devices building on a wafer-scale silicon-on-insulator heater platform.

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Citation Download Citation

Carlos Ríos, Yifei Zhang, Qingyang Du, Cosmin-Constantin Popescu, Mikhail Shalaginov, Paul Miller, Christopher Roberts, Myungkoo Kang, Kathleen Richardson, Sensong An, Clayton Fowler, Hualiang Zhang, Tian Gu, Steven A. Vitale, and Juejun Hu "Electrically-switchable foundry-processed phase change photonic devices", Proc. SPIE 11796, Active Photonic Platforms XIII, 117961Z (1 August 2021); https://doi.org/10.1117/12.2592021

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