The two-dimensional Gaussian filter weighting function for the cylindrical surface

Zhijun Ying; Yingjie Yu

doi:10.1117/12.2594433

1 August 2021 The two-dimensional Gaussian filter weighting function for the cylindrical surface

Zhijun Ying, Yingjie Yu

Proceedings Volume 11817, Applied Optical Metrology IV; 118170S (2021) https://doi.org/10.1117/12.2594433
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Conference Poster

Abstract

The roundness profile extraction strategy of the cylindricity measuring instrument (CMI) only uses 5-10 cross-section to evaluate the cylindricity, which can not exactly express the catachrestic of the cylindrical surface error. On the contrary, the measurement result of the stitching interferometry has the advantage of high resolution and high precision, which is able to meet the requirement of bird-cage extraction. So, in this paper, we build a two-dimensional (2D) Gaussian filter weighting function to extract the cylindrical profile, according to its special shape characteristic. Besides, an experiment has been carried out by taking a ceramic plug gauge as the workpiece. The extracted results of 1-50 undulation per revolution (UPR) in circumference direction and 1-10 UPR in generatrix direction demonstrate a good performance of our method.

Citation Download Citation

Zhijun Ying and Yingjie Yu "The two-dimensional Gaussian filter weighting function for the cylindrical surface", Proc. SPIE 11817, Applied Optical Metrology IV, 118170S (1 August 2021); https://doi.org/10.1117/12.2594433

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