A device library for the ultra-low loss Si3N4 platform

Q. Wilmart; S. Guerber; J. Faugier-Tovar; Yasmine Ibrahimi; Camille Petit-Etienne; Laurene Youssef; Carole Socquet-Clerc; André Myko; Karen Ribaud; François Duport; Erwine Pargon; Frédéric Van Dijk

doi:10.1117/12.2606853

5 March 2022 A device library for the ultra-low loss Si₃N₄ platform

Q. Wilmart, S. Guerber, J. Faugier-Tovar, Yasmine Ibrahimi, Camille Petit-Etienne, Laurene Youssef, Carole Socquet-Clerc, André Myko, Karen Ribaud, François Duport, Erwine Pargon, Frédéric Van Dijk

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Proceedings Volume 12006, Silicon Photonics XVII; 120060D (2022) https://doi.org/10.1117/12.2606853
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

The last few years have shown the success of silicon nitride platforms for ultra-low loss tightly confining waveguides. In addition to the low optical losses, the high Kerr nonlinearity, the high power handling capability and small bending radii makes the platform ideal for nonlinear photonics. Therefore, the potential for applications is huge: LiDAR, microwave optics, quantum photonics, neuromorphic computing, telecommunication, sensors… Here, we present our 200mm platform based on 800nm-thick LPCVD Si3N4 with optical losses below 5dB/m. It is completed with a set of photonic components: grating couplers, edge couplers, MMI, directional couplers, Y-junction and AWG multiplexer, which constitute the building blocks for advanced applications.

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Q. Wilmart, S. Guerber, J. Faugier-Tovar, Yasmine Ibrahimi, Camille Petit-Etienne, Laurene Youssef, Carole Socquet-Clerc, André Myko, Karen Ribaud, François Duport, Erwine Pargon, and Frédéric Van Dijk "A device library for the ultra-low loss Si₃N₄ platform", Proc. SPIE 12006, Silicon Photonics XVII, 120060D (5 March 2022); https://doi.org/10.1117/12.2606853

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