Front Matter: Volume 12013

doi:10.1117/12.2634558

24 March 2022 Front Matter: Volume 12013

Proceedings Volume 12013, MOEMS and Miniaturized Systems XXI; 1201301 (2022) https://doi.org/10.1117/12.2634558
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

This PDF file contains the front matter associated with SPIE Proceedings Volume 12013, including the Title Page, Copyright information, Table of Contents and Conference Committee lists.

The papers in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. Additional papers and presentation recordings may be available online in the SPIE Digital Library at SPIEDigitalLibrary.org.

The papers reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon.

Please use the following format to cite material from these proceedings:

Author(s), “Title of Paper,” in MOEMS and Miniaturized Systems XXI, edited by Hans Zappe, Wibool Piyawattanametha, Yong-Hwa Park, Proc. of SPIE 12013, Seven-digit Article CID Number (DD/MM/YYYY); (DOI URL).

ISSN: 0277-786X

ISSN: 1996-756X (electronic)

ISBN: 9781510648975

ISBN: 9781510648982 (electronic)

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Conference Committee

Symposium Chairs

Bernd Witzigmann, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)
Sonia M. García-Blanco, Universiteit of Twente (Netherlands)
Sailing He, Zhejiang University (China) and KTH Royal Institute of Technology (Sweden)
Yasuhiro Koike, Keio University (Japan)

Program Track Chairs

Holger Becker, microfluid ChipShop GmbH (Germany)
George von Freymann, Technische Universität Kaiserslautern (Germany)

Conference Chairs

Hans Zappe, Universität Freiburg (Germany)
Wibool Piyawattanametha, King Mongkut’s Institute of Technology Ladkrabang (Thailand) and Michigan State University (United States)
Yong-Hwa Park, KAIST (Korea, Republic of)

Conference Program Committee

Caglar Ataman, Universität Freiburg (Germany)
Robert Brunner, Ernst-Abbe-Hochschule Jena (Germany)
Pei-Yu Eric Chiou, University of California, Los Angeles (United States)
David L. Dickensheets, Montana State University (United States)
Jan Grahmann, Fraunhofer-Institut für Photonische Mikrosysteme IPMS (Germany)
Ulrich Hofmann, OQmented GmbH (Germany)
Ki-Hun Jeong, KAIST (Korea, Republic of)
Diaa A. M. Khalil, Si-Ware Systems (Egypt)
David G. Lishan, Plasma-Therm LLC (United States)
Veljko Milanović, Mirrorcle Technologies, Inc. (United States)
Yves-Alain Peter, Polytechnique Montréal (Canada)
Niels Quack, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Anna Rissanen, Aalto University (Finland)
Hamdi Torun, Northumbria University (United Kingdom)
Frédéric Zamkotsian, Laboratoire d’Astrophysique de Marseille (France)
Guangya Zhou, National University of Singapore (Singapore)