A 3D scanner: low footprint piezoelectric tunable optical scanner

Hitesh G. B. Gowda; Tobias Gräf; Ulrike Wallrabe

doi:10.1117/12.2605917

1 March 2022 A 3D scanner: low footprint piezoelectric tunable optical scanner

Hitesh G. B. Gowda, Tobias Gräf, Ulrike Wallrabe

Proceedings Volume 12013, MOEMS and Miniaturized Systems XXI; 120130D (2022) https://doi.org/10.1117/12.2605917
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

We present a unique approach for 3D scanners using a single optomechanical component, the tunable prism-lens. We cointegrated piezoelectric actuators with a fluid chamber bounded by a movable glass window at the top and a flexible membrane at the bottom. We assembled the four bending actuators in perpendicular orientation to achieve a small footprint and attached their free ends to the top glass window with thin beam plates. Thereby, we gain a large clear aperture of 18 mm at a small footprint of only 20x20x2.5 mm3 . The actuators can independently pull or push the glass window at the four corners, leading to a fluid displacement and correspondingly deforming the membrane. A symmetric actuation of all the actuators results in a lens effect, with a tunable focal power range of + 12.5 dpt to -10.5 dpt at a response time of 3.5 ms. Conversely, asymmetric actuation results in a prism effect, with a tunable bi-directional scan angle of ± 1.5° at a response time of 2 ms. Hence, both modes can be combined to achieve a 3-dimensional scan by selective actuation. Our unique single component 3D scanner reduces the size and complexity compared to a conventional mirror-lens setup. In the paper, we present the design, fabrication process, analytical model, and optomechanical characterization.

Conference Presentation

Citation Download Citation

Hitesh G. B. Gowda, Tobias Gräf, and Ulrike Wallrabe "A 3D scanner: low footprint piezoelectric tunable optical scanner", Proc. SPIE 12013, MOEMS and Miniaturized Systems XXI, 120130D (1 March 2022); https://doi.org/10.1117/12.2605917

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