Environmental studies on ALD metal fluorides for future far UV optical coatings

Robin E. Rodríguez; John Hennessy; April D. Jewell; Shouleh Nikzad; Parker C. Hinton; Nicholas Kruczek; Brian Fleming; Kevin France

doi:10.1117/12.2631413

29 August 2022 Environmental studies on ALD metal fluorides for future far UV optical coatings

Robin E. Rodríguez, John Hennessy, April D. Jewell, Shouleh Nikzad, Parker C. Hinton, Nicholas Kruczek, Brian Fleming, Kevin France

Author Affiliations +

Proceedings Volume 12181, Space Telescopes and Instrumentation 2022: Ultraviolet to Gamma Ray; 121813D (2022) https://doi.org/10.1117/12.2631413
Event: SPIE Astronomical Telescopes + Instrumentation, 2022, Montréal, Québec, Canada

Conference Poster

Abstract

This conference presentation was prepared for the Space Telescopes and Instrumentation 2022: Ultraviolet to Gamma Ray conference at SPIE Astronomical Telescopes + Instrumentation, 2022.

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Robin E. Rodríguez, John Hennessy, April D. Jewell, Shouleh Nikzad, Parker C. Hinton, Nicholas Kruczek, Brian Fleming, and Kevin France "Environmental studies on ALD metal fluorides for future far UV optical coatings", Proc. SPIE 12181, Space Telescopes and Instrumentation 2022: Ultraviolet to Gamma Ray, 121813D (29 August 2022); https://doi.org/10.1117/12.2631413

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