Intersectional nanofabrication of disk nanoantennas by colloidal lithography

Kai Chen; Churong Ma; Feng Zhao; Meng Li; Fangrong Zhou; Zhiliang Zhang

doi:10.1117/12.2642219

4 January 2023 Intersectional nanofabrication of disk nanoantennas by colloidal lithography

Kai Chen, Churong Ma, Feng Zhao, Meng Li, Fangrong Zhou, Zhiliang Zhang

Proceedings Volume 12322, Nanophotonics, Micro/Nano Optics, and Plasmonics VIII; 123220G (2023) https://doi.org/10.1117/12.2642219
Event: SPIE/COS Photonics Asia, 2022, Online Only

Abstract

Optical nanoantennas, made of metallic or dielectric materials, have seen a rapid development for their remarkable optical properties facilitating the coupling of electromagnetic waves with subwavelength entities. However, highthroughput and cost-effective fabrication of these nanoantennas is still a daunting challenge. Here we provide a versatile nanofabrication method capable of producing large scale disk-shaped optical nanoantennas. It is developed from colloidal lithography with no dry etching required. Furthermore, both metallic and all-dielectric nanodisks can be readily fabrication in a high-throughput fashion. We believe that this nanofabrication method could find a wide range of applications with the diverse optical nanoantennas it can engineer.

Conference Presentation

Citation Download Citation

Kai Chen, Churong Ma, Feng Zhao, Meng Li, Fangrong Zhou, and Zhiliang Zhang "Intersectional nanofabrication of disk nanoantennas by colloidal lithography", Proc. SPIE 12322, Nanophotonics, Micro/Nano Optics, and Plasmonics VIII, 123220G (4 January 2023); https://doi.org/10.1117/12.2642219

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