An integrated MEMS thermal emitter with piezoelectric actuation

Nanxi Li; Andrew Whye Keong Fong; Huanhuan Wang; Leh Woon Lim; Landobasa Y. M. Tobing; Yun Da Chua; Linfang Xu; Weiguo Chen; Qingxin Zhang; Hong Cai; Qi Jie Wang; Lennon Yao Ting Lee

doi:10.1117/12.2649536

15 March 2023 An integrated MEMS thermal emitter with piezoelectric actuation

Nanxi Li, Andrew Whye Keong Fong, Huanhuan Wang, Leh Woon Lim, Landobasa Y. M. Tobing, Yun Da Chua, Linfang Xu, Weiguo Chen, Qingxin Zhang, Hong Cai, Qi Jie Wang, Lennon Yao Ting Lee

Author Affiliations +

Proceedings Volume 12434, MOEMS and Miniaturized Systems XXII; 124340T (2023) https://doi.org/10.1117/12.2649536
Event: SPIE OPTO, 2023, San Francisco, California, United States

Conference Poster

Abstract

Microelectromechanical system (MEMS)-based thermal emitter is a key component in an optical sensor to provide broadband emission at mid-infrared wavelengths, where a lot of molecules have their unique absorption profile. However, the thermal emission from a MEMS emitter is typically fixed at a specific spatial coordinate. In this work, a MEMS thermal emitter with piezoelectric actuation to realize active tuning is demonstrated. Thermal emission comes from a doped silicon layer acting as a resistive heater. Piezoelectric actuation is enabled by an aluminum nitride layer on a designed cantilever. The devices are fabricated on a complementary metal-oxide semiconductor (CMOS)-compatible process line. The fabricated thermal emitter at the tip of the cantilever generates broadband MIR thermal emission with spectrum peaked around 10 μm wavelength, and piezoelectric actuation with a displacement of more than 20 μm. The work paves the way towards self-adaptable MEMS directional emitter for various applications including chemical/gas sensing.

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Nanxi Li, Andrew Whye Keong Fong, Huanhuan Wang, Leh Woon Lim, Landobasa Y. M. Tobing, Yun Da Chua, Linfang Xu, Weiguo Chen, Qingxin Zhang, Hong Cai, Qi Jie Wang, and Lennon Yao Ting Lee "An integrated MEMS thermal emitter with piezoelectric actuation", Proc. SPIE 12434, MOEMS and Miniaturized Systems XXII, 124340T (15 March 2023); https://doi.org/10.1117/12.2649536

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