Author Affiliations +
Yasutaka Higa,1 Gyongsok Song,1 Hideki Watanabe,1 Shuhei Yamaguchi,1 Yoshio Konishi,2 Hayato Kamizuru,2 Kiyohisa Sakai,3 Hirohisa Yasukawa,3 Rintaro Koda,1 Noriyuki Fuutagawa1
1Sony Group Corp. (Japan)
2Sony Semiconductor Manufacturing Corp. (Japan)
3Sony Semiconductor Solutions Corp. (Japan)