High-throughput and parallel direct laser writing system based on screen division multiplexing of  spatial light modulator

Jisen Wen; Chenliang Ding; Dazhao Zhu; Liang Xu; Cuifang Kuang; Xu Liu

doi:10.1117/12.2638237

15 November 2022 High-throughput and parallel direct laser writing system based on screen division multiplexing of spatial light modulator

Jisen Wen, Chenliang Ding, Dazhao Zhu, Liang Xu, Cuifang Kuang, Xu Liu

Author Affiliations +

Proceedings Volume 12448, 5th Optics Young Scientist Summit (OYSS 2022); 124480X (2022) https://doi.org/10.1117/12.2638237
Event: 5th Optics Young Scientist Summit (OYSS 2022), 2022, Fuzhou, China

Abstract

Direct laser writing technology has potential applications in the fabrication of micro and nanostructures such as photonic crystals and photonic chips. However, current single-channel direct laser writing systems are mainly limited to low-flux systems, which have disadvantages such as low direct writing efficiency and slow writing speed. To overcome the limitations, we proposed a method based on screen division multiplexing of the spatial light modulator to parallelly fabricate the nanostructures. The spatial light modulator is divided into two parts to achieve a single column of 20 beams array. After optimizing the uniformity of the 20-beam, a 20-channel high-throughput parallel laser direct writing is thus achieved. This scheme directly writes repetitive patterns by an order of magnitude faster than single-beam laser direct writing, which greatly improves the speed of laser direct writing and has important applications in the direct writing of large-area repetitive devices.

Citation Download Citation

Jisen Wen, Chenliang Ding, Dazhao Zhu, Liang Xu, Cuifang Kuang, and Xu Liu "High-throughput and parallel direct laser writing system based on screen division multiplexing of spatial light modulator", Proc. SPIE 12448, 5th Optics Young Scientist Summit (OYSS 2022), 124480X (15 November 2022); https://doi.org/10.1117/12.2638237

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KEYWORDS

Spatial light modulators

Multiphoton lithography

Modulation

Multiplexing

Holograms

Laser systems engineering

Mirrors

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