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Shift happens due to electron beam tilt in scanning electron microscopy. To measure this aberration effect with submilliradian uncertainty, and to calibrate scale factor and correct scanfield distortion, we introduce conical frustum arrays as multifunctional reference structures. Our concept shows promise for new accuracy in scanning electron microscopy.
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Andrew C. Madison, John S. Villarrubia, Daron A. Westly, Ronald G. Dixson, Craig R. Copeland, John D. Gerling, Katherine A. Cochrane, Alan D. Brodie, Lawrence P. Muray, J. Alexander Liddle, Samuel M. Stavis, "A total shift show: submilliradian tilt goniometry in scanning electron microscopy," Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, 1249606 (30 April 2023); https://doi.org/10.1117/12.2673963