Paper
9 January 2023 Research on the optical properties of SiO2-Al2O3 sintering material
Author Affiliations +
Abstract
With the wide application of optical thin films, the requirements for the spectral transmission range and refractive index of thin film materials are getting higher and higher. In this paper, a new type of thin film material sintered from SiO2 and Al2O3 is studied. The single-layer film was evaporated by electron beam evaporation, and its refractive index uniformity was measured by ellipsometer and its spectral transmission range was measured by spectrophotometer and Fourier spectrometer. Finally, a multi-layer high-reflection film is prepared by using the material, and the film has a high reflectivity and a flat and uniform surface.
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Suotao Dong, Xiuhua Fu, and Cheng Li "Research on the optical properties of SiO2-Al2O3 sintering material", Proc. SPIE 12507, Advanced Optical Manufacturing Technologies and Applications 2022; and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022), 125070P (9 January 2023); https://doi.org/10.1117/12.2654801
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KEYWORDS
Transmittance

Electron beams

Thin films

Optical properties

Refractive index

Infrared spectroscopy

Multilayers

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