Raman spectroscopy for thermal characterization of semiconductor devices

Martin De Biasio; Thomas Arnold; Clement Fleury; Dmytro Solonenko

doi:10.1117/12.2682223

15 June 2023 Raman spectroscopy for thermal characterization of semiconductor devices

Martin De Biasio, Thomas Arnold, Clement Fleury, Dmytro Solonenko

Proceedings Volume 12516, Next-Generation Spectroscopic Technologies XV; 1251611 (2023) https://doi.org/10.1117/12.2682223
Event: SPIE Defense + Commercial Sensing, 2023, Orlando, Florida, United States

Conference Poster

Abstract

Raman spectroscopy was used to measure the temperature of semiconductor test structures. The structures consist of molybdenum microwires on a Si (100) substrate buried under a 270nm layer of aluminum nitride. The temperature-dependent Raman spectra of the examined materials were measured in a temperature range from 30 °C to 450 °C using a scientific grade temperature stage for calibration. The relationship between the structure’s temperature and its Raman peak position was modeled. This model was used to estimate the temperature distribution across the test structure at different operating powers with high spatial and temperature resolution.

Citation Download Citation

Martin De Biasio, Thomas Arnold, Clement Fleury, and Dmytro Solonenko "Raman spectroscopy for thermal characterization of semiconductor devices", Proc. SPIE 12516, Next-Generation Spectroscopic Technologies XV, 1251611 (15 June 2023); https://doi.org/10.1117/12.2682223

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available