Capabilities of scaled microbolometers for uncooled thermal imaging below 10µm pixel pitch

M. Michel; S. Blaeser; A. Litke; E. Zakizade; S. Weyers; D. Weiler

doi:10.1117/12.2663466

13 June 2023 Capabilities of scaled microbolometers for uncooled thermal imaging below 10μm pixel pitch

M. Michel, S. Blaeser, A. Litke, E. Zakizade, S. Weyers, D. Weiler

Proceedings Volume 12534, Infrared Technology and Applications XLIX; 1253419 (2023) https://doi.org/10.1117/12.2663466
Event: SPIE Defense + Commercial Sensing, 2023, Orlando, Florida, United States

Abstract

The reduction of the pixel pitch of uncooled thermal imagers is still ongoing and by the end of 2021, reached a size of only 8µm within commercially available products. In case of those small pixel sizes, design and manufacturing requirements become more challenging by facing the main technological objectives of maximizing the temperature rise within the microbolometer membrane and simultaneously, being sensitive towards the latter. Tackling these challenges, Fraunhofer IMS provides a manufacturing process for uncooled thermal imagers optimized for the LWIR regime based on a scalable microbolometer technology incorporating vertical nanotubes. Based on this technological concept, we already demonstrated microbolometers with full electro-optical functionality for pixel sizes ranging from 17µm down to 6µm. A comprehensive study of our measurements regarding the scalable microbolometer technology will be presented here. This includes a discussion about design requirements in correlation to the achieved electro-optical results covering electrical noise, NETD, thermal time constant and spectral absorption characteristics. Those key parameters will be summarized and evaluated with respect to the reduction of the active microbolometer area in case of a shrinked pixel size.

Conference Presentation

Citation Download Citation

M. Michel, S. Blaeser, A. Litke, E. Zakizade, S. Weyers, and D. Weiler "Capabilities of scaled microbolometers for uncooled thermal imaging below 10μm pixel pitch", Proc. SPIE 12534, Infrared Technology and Applications XLIX, 1253419 (13 June 2023); https://doi.org/10.1117/12.2663466

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available