Development of multilayer gratings for Solar-C EUV spectro-imager

A. H. K. Mahmoud; S. de Rossi; E. Meltchakov; E. Papagiannouli; B. Capitanio; M. Thomasset; A. Philippon; F. Auchère; F. Delmotte

doi:10.1117/12.2665459

7 June 2023 Development of multilayer gratings for Solar-C EUV spectro-imager

A. H. K. Mahmoud, S. de Rossi, E. Meltchakov, E. Papagiannouli, B. Capitanio, M. Thomasset, A. Philippon, F. Auchère, F. Delmotte

Author Affiliations +

Proceedings Volume 12576, EUV and X-ray Optics: Synergy between Laboratory and Space VIII; 1257608 (2023) https://doi.org/10.1117/12.2665459
Event: SPIE Optics + Optoelectronics, 2023, Prague, Czech Republic

Abstract

We present here experimental results and modeling of multilayer gratings developed for the EUV spectro-imager abroad Solar-C mission. Periodic Al/Mo/SiC multilayers were optimized and deposited by magnetron sputtering on high groove density lamellar gratings with various depths. All grating samples were characterized before and after multilayer deposition by atomic force microscopy (AFM) and by grazing incidence x-ray reflectometry (GIXR) at 8.05 keV. AFM measurements reveal the surface prole evolution when the number of deposited layers increases. This effect is confirmed with a transmission electron microscope cross-section analysis. The EUV diffraction efficiency of the multilayer gratings was measured by monochromatic synchrotron radiation on the XUV Metrology beamline at SOLEIL Synchrotron. The results are in good agreement with the model simulated by rigorous coupled-wave analysis and using structural parameters determined by AFM and GIXR. The measured near-normal incidence first-order efficiency reaches a maximum of about 9.27%, 6.54%, and 7.18% at wavelengths of 27.3 nm, 21.4 nm, and 19.4 nm respectively.

Conference Presentation

Citation Download Citation

A. H. K. Mahmoud, S. de Rossi, E. Meltchakov, E. Papagiannouli, B. Capitanio, M. Thomasset, A. Philippon, F. Auchère, and F. Delmotte "Development of multilayer gratings for Solar-C EUV spectro-imager", Proc. SPIE 12576, EUV and X-ray Optics: Synergy between Laboratory and Space VIII, 1257608 (7 June 2023); https://doi.org/10.1117/12.2665459

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available