Real-time warpage deformation monitoring using distributed optical fiber sensing

Shun Liu; Pingyu Zhu; Zhecong Lin; Yabin Zhou; Marcelo A. Soto

doi:10.1117/12.2668453

27 February 2023 Real-time warpage deformation monitoring using distributed optical fiber sensing

Shun Liu, Pingyu Zhu, Zhecong Lin, Yabin Zhou, Marcelo A. Soto

Proceedings Volume 12585, International Conference on Precision Instruments and Optical Engineering (PIOE 2022); 1258506 (2023) https://doi.org/10.1117/12.2668453
Event: International Conference on Precision Instruments and Optical Engineering (PIOE 2022), 2022, Guangzhou, China

Abstract

The warpage deformation of a silicon plate is monitored in real-time using distributed optical fiber and the influence of data resolution on the measurement result is studied. The experimental results show that this method has good accuracy and the relationship between data resolution and measurement error is non-linear.

Citation Download Citation

Shun Liu, Pingyu Zhu, Zhecong Lin, Yabin Zhou, and Marcelo A. Soto "Real-time warpage deformation monitoring using distributed optical fiber sensing", Proc. SPIE 12585, International Conference on Precision Instruments and Optical Engineering (PIOE 2022), 1258506 (27 February 2023); https://doi.org/10.1117/12.2668453

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