Reduction of influence caused by mirror tilting in phase measuring deflectometry

W. Jiang; M. Fujigaki

doi:10.1117/12.3005533

20 September 2023 Reduction of influence caused by mirror tilting in phase measuring deflectometry

W. Jiang, M. Fujigaki

Proceedings Volume 12607, Optical Technology and Measurement for Industrial Applications Conference; 126070B (2023) https://doi.org/10.1117/12.3005533
Event: Optics and Photonics International Congress, 2023, Yokohama, Japan

Abstract

In the conventional deflectometry, since the observation target is a virtual image generated by the mirror, measuring is highly sensitive to the titling angle of mirror. That means it is hard to use this method to measure the displacement. Here, we proposed a new type of deflectometry method, in which the observation target is the surface of the observed mirror. Using an imaging lens, the measurement fringes are projected on the surface of mirror. The result show that the proposed method is lower sensitive to the titling angle of the mirror compared to the conventional deflectometry.

Citation Download Citation

W. Jiang and M. Fujigaki "Reduction of influence caused by mirror tilting in phase measuring deflectometry", Proc. SPIE 12607, Optical Technology and Measurement for Industrial Applications Conference, 126070B (20 September 2023); https://doi.org/10.1117/12.3005533

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