An intelligent recognition system and method for appearance defects of microchips

Huarong Yan

doi:10.1117/12.2678941

8 May 2023 An intelligent recognition system and method for appearance defects of microchips

Huarong Yan

Proceedings Volume 12635, Second International Conference on Algorithms, Microchips, and Network Applications (AMNA 2023); 126350M (2023) https://doi.org/10.1117/12.2678941
Event: International Conference on Algorithms, Microchips, and Network Applications 2023, 2023, Zhengzhou, China

Abstract

The appearance of small microchips has few defect samples, and the effective defect sample data of previous large-packaged chips can support the training of defect detection algorithms to obtain high accuracy. The current mainstream detection algorithms have a poor ability to detect small targets, which can lead to missed detection and false detection. In this paper, based on existing artificial intelligence techniques, such as transfer learning and SSD (Single Shot MultiBox Detector), we propose an intelligent detection system for microchip appearance defects based on transfer learning for the current stage of the chip appearance defect detection problem. In this paper, the appearance defect samples of larger chips in the past are migrated to microchips as knowledge to improve the accuracy of defect detection. The SSD algorithm is improved to enhance the image features, and the idea of cross-level feature fusion is used to improve the feature expression and strengthen the semantic information.

Citation Download Citation

Huarong Yan "An intelligent recognition system and method for appearance defects of microchips", Proc. SPIE 12635, Second International Conference on Algorithms, Microchips, and Network Applications (AMNA 2023), 126350M (8 May 2023); https://doi.org/10.1117/12.2678941

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