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28 November 2023 Wavefront reconstruction for double-grating Ronchi lateral shearing interferometry with nonlinear optimization
Runzhou Shi, Huiwen Liu, Yuqi Shao, Jian Bai
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Proceedings Volume 12765, Optical Design and Testing XIII; 127650S (2023) https://doi.org/10.1117/12.2688489
Event: SPIE/COS Photonics Asia, 2023, Beijing, China
Abstract
Traditional phase retrieval methods for Ronchi lateral shearing interferometry eliminate the impact of high diffraction orders by increasing the number of phase-shifting interferograms, however, this introduces additional error in the phase-shifting process. We propose an optimization method combining a 2-frame phase-shifting algorithm to achieve accurate wavefront reconstruction. A numerical model matching the physical model is constructed and the cross-iterative gradient descent method is used to optimize the initial results obtained by the two-step phase-shifting method. The accuracy and robustness of the method are verified by simulations and experiments. The proposed method has the advantages of achieving high-precision wavefront reconstruction and correcting the phase-shifting errors, and it significantly simplifies the process of phase shift.
(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Runzhou Shi, Huiwen Liu, Yuqi Shao, and Jian Bai "Wavefront reconstruction for double-grating Ronchi lateral shearing interferometry with nonlinear optimization", Proc. SPIE 12765, Optical Design and Testing XIII, 127650S (28 November 2023); https://doi.org/10.1117/12.2688489
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KEYWORDS
Phase shifts
Wavefronts
Wavefront reconstruction
Interferograms
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