The printability of 1x reticle defects

Nora Tuttle

doi:10.1117/12.3011321

10 October 2023 The printability of 1x reticle defects

Nora Tuttle

Proceedings Volume 12807, Bay Area Chrome Users Society Symposium 1983; 1280707 (2023) https://doi.org/10.1117/12.3011321
Event: 3rd Annual BACUS Symposium, 1983, Santa Clara, CA, United States

Abstract

I’m grateful for this opportunity to discuss Ultratech Stepper lx reticles and the mask making requirements. Two years ago the Ultratech lx reticle was seen as a nearly impossible mask making feat. Today, thanks to talented and determined people, Ultratech lx reticles are being made in volume production to support leading edge devices

Citation Download Citation

Nora Tuttle "The printability of 1x reticle defects", Proc. SPIE 12807, Bay Area Chrome Users Society Symposium 1983, 1280707 (10 October 2023); https://doi.org/10.1117/12.3011321

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