Critical dimension standard correlations

Steve Smith

doi:10.1117/12.3011331

10 October 2023 Critical dimension standard correlations

Steve Smith

Proceedings Volume 12807, Bay Area Chrome Users Society Symposium 1983; 128070H (2023) https://doi.org/10.1117/12.3011331
Event: 3rd Annual BACUS Symposium, 1983, Santa Clara, CA, United States

Abstract

You recall that earlier this morning Reed Welsh mentioned that, with the tolerances that we’re experiencing today in our product, any kind of a difference between measurement standards is important. To go ahead and document our study to this group, we used the Nikon NPA’s that were in our mask lab. As you know you can use any kind of a standard to calibrate the machines. We used the Roger Sherman standard originally, and we went to use the NBS standard for this one customer. As you also might be aware, a line width measure to Roger Sherman three remeasured at NBS will give you two different values. We had two NBS standards in our lab and that they both tracked each other very well. So I’m just going to group those two together for this presentation.

Citation Download Citation

Steve Smith "Critical dimension standard correlations", Proc. SPIE 12807, Bay Area Chrome Users Society Symposium 1983, 128070H (10 October 2023); https://doi.org/10.1117/12.3011331

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