Optical tools for laser machining along six orders of magnitude

Julian Hellstern; Christoph Tillkorn; Tim Hieronymus; Myriam Kaiser; Torsten Beck; Daniel Flamm

doi:10.1117/12.3002211

12 March 2024 Optical tools for laser machining along six orders of magnitude

Julian Hellstern, Christoph Tillkorn, Tim Hieronymus, Myriam Kaiser, Torsten Beck, Daniel Flamm

Proceedings Volume 12878, High-Power Laser Materials Processing: Applications, Diagnostics, and Systems XIII; 1287802 (2024) https://doi.org/10.1117/12.3002211
Event: SPIE LASE, 2024, San Francisco, California, United States

Abstract

We present an overview on the development and characterization of multiscale laser processing optics for versatile material modifications across more than six orders of magnitude. Starting with solutions for micromachining we present high-NA microscope objectives creating sub-wavelength material modifications on macroscopic scales with highest peak intensities. Moving on to the millimeter range, the adaptability and scalability of scanning optics is examined for large-area machining. Finally, we explore line beam optics in the meter range, evaluating their use in uniform material processing using average powers above 100 kW. This study provides an insight into the design and performance characteristics of such optics and demonstrates their potential in advanced laser processing.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Julian Hellstern, Christoph Tillkorn, Tim Hieronymus, Myriam Kaiser, Torsten Beck, and Daniel Flamm "Optical tools for laser machining along six orders of magnitude", Proc. SPIE 12878, High-Power Laser Materials Processing: Applications, Diagnostics, and Systems XIII, 1287802 (12 March 2024); https://doi.org/10.1117/12.3002211

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KEYWORDS

Beam shaping

Design

Laser processing

Glasses

Monochromatic aberrations

Laser cutting

Laser applications

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