Modelling the side-wall roughness scattering loss of MEMS-based optical waveguides using the perturbation theory and the generalized Harvey-Shack model

Ahmed M. Othman; Amr O. Ghoname; Yasser M. Sabry; Diaa Khalil; Tarik Bourouina

doi:10.1117/12.3003708

12 March 2024 Modelling the side-wall roughness scattering loss of MEMS-based optical waveguides using the perturbation theory and the generalized Harvey-Shack model

Ahmed M. Othman, Amr O. Ghoname, Yasser M. Sabry, Diaa Khalil, Tarik Bourouina

Author Affiliations +

Proceedings Volume 12899, MOEMS and Miniaturized Systems XXIII; 128990M (2024) https://doi.org/10.1117/12.3003708
Event: SPIE OPTO, 2024, San Francisco, California, United States

Conference Poster

Abstract

The fabrication of optical waveguides using MEMS technology usually leads to scallops on the waveguide sidewalls, causing scattering loss due to the resulting surface roughness. Since these waveguides are usually wide and multimode, we extend the model based on perturbation theory developed by Dietrich Marcuse to the case of multimode slab waveguides. We compare the resulting model to the use of the Generalized Harvey-Shack scattering model and the ray picture to model the scattering loss. The comparison is performed for a waveguide width between 20 μm and 500 μm, and length ranging from 1 mm to 5 mm.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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Ahmed M. Othman, Amr O. Ghoname, Yasser M. Sabry, Diaa Khalil, and Tarik Bourouina "Modelling the side-wall roughness scattering loss of MEMS-based optical waveguides using the perturbation theory and the generalized Harvey-Shack model", Proc. SPIE 12899, MOEMS and Miniaturized Systems XXIII, 128990M (12 March 2024); https://doi.org/10.1117/12.3003708

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