Fabrication of diffraction gratings using sol-gel method and imprinting method

Itsunari Yamada

doi:10.1117/12.3011435

6 June 2024 Fabrication of diffraction gratings using sol-gel method and imprinting method

Itsunari Yamada

Proceedings Volume 13021, Optical Fabrication and Testing VIII; (2024) https://doi.org/10.1117/12.3011435
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Conference Poster

Abstract

A titania grating with a high diffraction efficiency was fabricated using sol-gel method and imprinting technique with silicone mold. For this process, titania sol was dropped onto a silicone mold transferred from the photoresist pattern by the imprinting process, and then retransferred onto a glass substrate to form a titania diffraction grating. The first -order diffraction transmittance of the fabricated element with a 1.0-μm pitch and a depth of 0.48 μm was 31.7% at a wavelength of 632.8 nm. This grating can be fabricated without using expensive apparatuses such as reactive ion etching and molding equipment.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Itsunari Yamada "Fabrication of diffraction gratings using sol-gel method and imprinting method", Proc. SPIE 13021, Optical Fabrication and Testing VIII, (6 June 2024); https://doi.org/10.1117/12.3011435

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