A metasurface structure design for performance enhancement of SPAD detectors

Shanyan Huang; Tianqi Zhao; Haoran Xue; Shaoxin Zheng; Xianfeng Lin

doi:10.1117/12.3016407

1 February 2024 A metasurface structure design for performance enhancement of SPAD detectors

Shanyan Huang, Tianqi Zhao, Haoran Xue, Shaoxin Zheng, Xianfeng Lin

Proceedings Volume 13068, Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023); 1306808 (2024) https://doi.org/10.1117/12.3016407
Event: Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023), 2023, Hefei, China

Abstract

This paper discusses several metasurface structures for optimizing the performance of silicon-based SPAD single-photon detectors, enabling them to overcome the material bandgap limitation of silicon and achieve a significant enhancement in absorption efficiency in the wavelength range above 1100nm. The mentioned metasurface structures consist of periodic arrays and utilize Surface Plasmon Resonance (SPR) and three-dimensional cavity effects to induce strong electric field enhancement at the metal-silicon interface through the excitation of Surface Plasmon Polaritons (SPPs). This imparts the detector with a strong light-capturing capability. The performance differences in absorption efficiency among these metasurface structures are elaborated upon, and the feasibility of their integration with SPAD single-photon detectors is discussed.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Shanyan Huang, Tianqi Zhao, Haoran Xue, Shaoxin Zheng, and Xianfeng Lin "A metasurface structure design for performance enhancement of SPAD detectors", Proc. SPIE 13068, Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023), 1306808 (1 February 2024); https://doi.org/10.1117/12.3016407

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