Simulation of photoelectric response in pixel microregion of silicon APD array

Jie Deng; Jian Chen; Qianqian Wang; Hongling Peng; Xin Hao; Yong Liu; Guoling Luo; Mengqi Yao; Liu Yuan; Zeyuan Wang

doi:10.1117/12.3023254

18 March 2024 Simulation of photoelectric response in pixel microregion of silicon APD array

Jie Deng, Jian Chen, Qianqian Wang, Hongling Peng, Xin Hao, Yong Liu, Guoling Luo, Mengqi Yao, Liu Yuan, Zeyuan Wang

Proceedings Volume 13104, Advanced Fiber Laser Conference (AFL2023); 131042X (2024) https://doi.org/10.1117/12.3023254
Event: Advanced Fiber Laser Conference (AFL2023), 2023, Shenzhen, China

Abstract

The simulations of quasi one-dimensional (1D) and quasi three-dimensional (3D) device process and optoelectronic performance were conducted on silicon APD array pixels using Silvaco, realizing micro region analysis of the electric field distribution, avalanche gain, and photoelectric response characteristics of the APD photosensitive region. The multiplication coefficients corresponding to different positions of APD pixel were obtained and compared with the ideal 1D device structure. The results show that the multiplication factor of the center region of APD pixel is significantly higher than that of the edge of the photosensitive region. The simulation of microlens to converge the incident light to the center of the photosensitive region confirmed the increasement of APD avalanche multiplication current, i.e. the quasi 3D structural APD response is increased from 13.6 A/W to 54.8 A/W, and the effective fill factor is increased from 20.9% to 84.2%. Thus, the utilization rate of incident light is effectively improved.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jie Deng, Jian Chen, Qianqian Wang, Hongling Peng, Xin Hao, Yong Liu, Guoling Luo, Mengqi Yao, Liu Yuan, and Zeyuan Wang "Simulation of photoelectric response in pixel microregion of silicon APD array", Proc. SPIE 13104, Advanced Fiber Laser Conference (AFL2023), 131042X (18 March 2024); https://doi.org/10.1117/12.3023254

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KEYWORDS

Avalanche photodetectors

Electric fields

Incident light

Silicon

Microlens

Microlens array

Detector arrays

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