25 years of progress in lithographic optics design methods

David Shafer

doi:10.1117/12.3029195

1 October 2024 25 years of progress in lithographic optics design methods

David Shafer

Proceedings Volume 13131, Current Developments in Lens Design and Optical Engineering XXV; 1313105 (2024) https://doi.org/10.1117/12.3029195
Event: Optical Engineering + Applications, 2024, San Diego, California, United States

Abstract

Several new optical design methods have been developed over the last 25 years for lithographic optics, leading to greatly improved designs.

Conference Presentation

Citation Download Citation

David Shafer "25 years of progress in lithographic optics design methods", Proc. SPIE 13131, Current Developments in Lens Design and Optical Engineering XXV, 1313105 (1 October 2024); https://doi.org/10.1117/12.3029195

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