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David Shafer
"25 years of progress in lithographic optics design methods", Proc. SPIE 13131, Current Developments in Lens Design and Optical Engineering XXV, 1313105 (1 October 2024); https://doi.org/10.1117/12.3029195
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David Shafer, "25 years of progress in lithographic optics design methods," Proc. SPIE 13131, Current Developments in Lens Design and Optical Engineering XXV, 1313105 (1 October 2024); https://doi.org/10.1117/12.3029195