A dual-detection chromatic confocal probe employing a mode-locked femtosecond laser

Ryo Sato; Chen Li; Hiraku Matsukuma; Wei Gao

doi:10.1117/12.3026365

30 September 2024 A dual-detection chromatic confocal probe employing a mode-locked femtosecond laser

Ryo Sato, Chen Li, Hiraku Matsukuma, Wei Gao

Proceedings Volume 13134, Optical Manufacturing and Testing 2024; 1313402 (2024) https://doi.org/10.1117/12.3026365
Event: Optical Engineering + Applications, 2024, San Diego, California, United States

Abstract

Confocal probes, which consists of a point light source and a point detector, have been widely used in the manufacturing industry for a surface profile measurement of a measurement target object. In recent years, a mode-locked laser, which has advantages; high-stable optical frequency and wide-range optical frequency, and high-stable intensity, has been employed as a light source of the confocal probes, enabling to non-scanning and precise height measurement. However, a non-smoothness of the optical spectrum of the mode-locked laser affects a confocal response curve, which is utilized for the target position measurement, and leads to loss of the measurement accuracy. Therefore, a dual-detection chromatic confocal probe has been proposed and researched to reduce the effects of the non-smoothness optical spectra. In this paper, a review about the dual-detection chromatic confocal probe is summarized.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Ryo Sato, Chen Li, Hiraku Matsukuma, and Wei Gao "A dual-detection chromatic confocal probe employing a mode-locked femtosecond laser", Proc. SPIE 13134, Optical Manufacturing and Testing 2024, 1313402 (30 September 2024); https://doi.org/10.1117/12.3026365

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