Effect of oxygen-argon ratio on the performance of ZnO thin films and flexible ultraviolet photodetectors

Yuhan Duan; Nianguo Wei

doi:10.1117/12.3034098

5 July 2024 Effect of oxygen-argon ratio on the performance of ZnO thin films and flexible ultraviolet photodetectors

Yuhan Duan, Nianguo Wei

Proceedings Volume 13183, International Conference on Optoelectronic Information and Functional Materials (OIFM 2024); 1318328 (2024) https://doi.org/10.1117/12.3034098
Event: The 3rd International Conference on Optoelectronic Information and Functional Materials (OIFM 2024), 2024, Wuhan, China

Abstract

Zinc oxide (ZnO) with a wurtzite structure exhibits excellent optoelectronic and semiconductor properties, thus showing promising applications in the field of ultraviolet (UV) detection. However, the existing ZnO-based UV photodetectors on rigid substrates are limited in practical applications due to the constraints of rigid substrates, making it difficult to meet the complex and demanding environmental requirements. In this work, ZnO thin films were deposited on flexible polyethylene terephthalate (PET) substrate by radio frequency (RF) magnetron sputtering technique. Metal-semiconductor-metal (MSM) structured ZnO UV photodetectors were fabricated. The influence of oxygen-argon ratio on the deposition of ZnO thin films and the performance of flexible UV photodetectors was investigated. It was found that ZnO thin films exhibited higher crystalline quality when the oxygen-argon ratio was 10:40. This research provides a material basis for the development of flexible UV photodetectors.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yuhan Duan and Nianguo Wei "Effect of oxygen-argon ratio on the performance of ZnO thin films and flexible ultraviolet photodetectors", Proc. SPIE 13183, International Conference on Optoelectronic Information and Functional Materials (OIFM 2024), 1318328 (5 July 2024); https://doi.org/10.1117/12.3034098

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KEYWORDS

Zinc oxide

Thin films

Ultraviolet radiation

Photodetectors

Crystals

Oxygen

Sputter deposition

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