New approaches of supersmooth surfaces diagnostics by using carbon nanoparticles

Claudia Yu. Zenkova; Dmytro I. Ivanskyi; Vladyslav M. Tkachuk; Mykhailo Diachenko

doi:10.1117/12.3021745

12 June 2024 New approaches of supersmooth surfaces diagnostics by using carbon nanoparticles

Claudia Yu. Zenkova, Dmytro I. Ivanskyi, Vladyslav M. Tkachuk, Mykhailo Diachenko

Proceedings Volume 13187, Advances in 3OM: Opto-Mechatronics, Opto-Mechanics, and Optical Metrology (3OM 2023); 1318706 (2024) https://doi.org/10.1117/12.3021745
Event: Advances in 3OM: Opto-Mechatronics, Opto-Mechanics, and Optical Metrology, 2023, Timisoara, Romania

Abstract

The paper offers a new approach associated with the use of luminescent carbon nanoparticles for the studies of super-smooth surfaces (Rq~4–5 nm). Fluorescent nanoparticles can serve as highly-sensitive probes of the object surface inhomogeneities, realizing a contactless version of the atomic-force profilometry. Using structured light for particles’ fluorescence excitation enables to resolve the fine structural units of the surface relief in the nanometer range. The use of nanoparticles as a probe makes it possible to circumvent the spatial-resolution limitations of optical systems dictated by the classical wave-optics concepts (Rayleigh limit).

Citation Download Citation

Claudia Yu. Zenkova, Dmytro I. Ivanskyi, Vladyslav M. Tkachuk, and Mykhailo Diachenko "New approaches of supersmooth surfaces diagnostics by using carbon nanoparticles", Proc. SPIE 13187, Advances in 3OM: Opto-Mechatronics, Opto-Mechanics, and Optical Metrology (3OM 2023), 1318706 (12 June 2024); https://doi.org/10.1117/12.3021745

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