Silicon and silicon nitride cylindrical microresonators made of optical fibers with sputter deposition

Natalya A. Makarova; Vadim S. Terentyev; Ilya D. Vatnik

doi:10.1117/12.3036300

20 November 2024 Silicon and silicon nitride cylindrical microresonators made of optical fibers with sputter deposition

Natalya A. Makarova, Vadim S. Terentyev, Ilya D. Vatnik

Author Affiliations +

Proceedings Volume 13244, Nano-optoelectronics and Micro/Nano-photonics X; 1324406 (2024) https://doi.org/10.1117/12.3036300
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Abstract

A cylindrical microresonator based on standard silica optical fibers is a promising platform for nonlinear devices such as low-repetition rate frequency comb generators. Though, enlarged mode volumes lead to higher pump powers and third-order nonlinearity level together with the stricter requirements on low propagation losses in order to achieve effective four-wave nonlinear interactions. We consider sputter deposition of thin films with higher nonlinear refractive index made of silicon and silicon nitride layers to enhance the nonlinearity within the microcavity. We inspect the variations of the cylinder radius that arise during the deposition and determine the quality factors achievable.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Natalya A. Makarova, Vadim S. Terentyev, and Ilya D. Vatnik "Silicon and silicon nitride cylindrical microresonators made of optical fibers with sputter deposition", Proc. SPIE 13244, Nano-optoelectronics and Micro/Nano-photonics X, 1324406 (20 November 2024); https://doi.org/10.1117/12.3036300

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