Paper
13 November 2024 An ultra-compact differential confocal sensor based on a system of metasurfaces
Zhicheng Zhao, Wenxiang Peng, Yang Ou, Yueqiang Hu, Shanyong Chen
Author Affiliations +
Proceedings Volume 13280, Advanced Optical Manufacturing Technologies and Applications 2024; and Fourth International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2024); 1328011 (2024) https://doi.org/10.1117/12.3048002
Event: Second Conference on Advanced Optical Manufacturing Technologies and Applications & Fourth Forum of Young Scientists on Advanced Optical Manufacturing, 2024, Xi'an, China
Abstract
Owing to the powerful capability to manipulate light of the metasurface, here, we propose an ultra-compact differential confocal sensor based on two dielectric metasurface layers, in which the conventional focusing lens and beam splitter are replaced by the dielectric metasurfaces. We introduce the design of the dielectric metasurfaces based on truncated waveguide-type silicon nitride meta-atoms at the wavelength of 633 nm. The focusing performance of each metasurface was studied by the finite difference time domain method. Subsequently, the performance of the differential confocal system was simulated according to the ray tracing method. Metasurface-based optical sensors are expected to serve as the foundational elements of low-cost, miniaturized, and lightweight optical sensors in the future.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Zhicheng Zhao, Wenxiang Peng, Yang Ou, Yueqiang Hu, and Shanyong Chen "An ultra-compact differential confocal sensor based on a system of metasurfaces", Proc. SPIE 13280, Advanced Optical Manufacturing Technologies and Applications 2024; and Fourth International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2024), 1328011 (13 November 2024); https://doi.org/10.1117/12.3048002
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KEYWORDS
Confocal microscopy

Sensors

Dielectrics

Miniaturization

Design

Silicon nitride

Finite-difference time-domain method

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