Integrated rapid isothermal processing

Rajendra Singh; Sanjai Sinha; Randhir P. S. Thakur; N. J. Hsu

doi:10.1117/12.48968

1 April 1991 Integrated rapid isothermal processing

Rajendra Singh, Sanjai Sinha, Randhir P. S. Thakur, N. J. Hsu

Proceedings Volume 1393, Rapid Thermal and Related Processing Techniques; (1991) https://doi.org/10.1117/12.48968
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

Rapid isothermal processing (RIP) based on incoherent sources of light is emerging as a reduced thermal budget (product of processing time and temperature) processing technique. As compared to a stand alone annealing unit the integration of RIP with other processing units leading to integrated RIP systems is very attractive for the next generation of devices and circuits. From cost and performance point of view the integrated rapid isothermal processing of these devices offers several advantages compared to their exsitu rapid isothermal annealed and furnace annealed counterparts. We have used an integrated RIP system for the insitu rapid isothermal surface cleaning of InP and GaAs substrates and insitu metallization of InP and GaAs Schottky diodes. As compared to exsitu annealing insitu rapid isothermal cleaning of InP and GaAs surfaces prior to metallization followed by insitu annealing results in improved electrical characteristics. We have also integrated a plasma source with a RIP system and studied the thermal oxidation of Si at 300C followed by an insitu rapid isothermal anneal. In this paper we also show that photo effects play a significant part in RIP. I.

Citation Download Citation

Rajendra Singh, Sanjai Sinha, Randhir P. S. Thakur, and N. J. Hsu "Integrated rapid isothermal processing", Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); https://doi.org/10.1117/12.48968

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available