Ion-beam-sputtering deposition and etching of high-Tc YBCO superconducting thin films

Xing-Rong Zhao; Jianhua Hao; Fang Qiao Zhou; Han-Don Sun; Lingjie Wang; Xinjian Yi

doi:10.1117/12.47255

1 November 1991 Ion-beam-sputtering deposition and etching of high-T_c YBCO superconducting thin films

Xing-Rong Zhao, Jianhua Hao, Fang Qiao Zhou, Han-Don Sun, Lingjie Wang, Xinjian Yi

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47255
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

High Tc YBaCuO superconducting films have been prepared with ceramic and powder targets, the typical deposition parameters have been given. We also patterned YBCO films with a parallel Ar ion source. Little degradation of Tco by the etching was observed.

Citation Download Citation

Xing-Rong Zhao, Jianhua Hao, Fang Qiao Zhou, Han-Don Sun, Lingjie Wang, and Xinjian Yi "Ion-beam-sputtering deposition and etching of high-T_c YBCO superconducting thin films", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47255

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