Laser-target interactions and its effect in controlling properties of laser-deposited superconducting thin films

Michael P. Siegal

doi:10.1117/12.2321836

1 March 1992 Laser-target interactions and its effect in controlling properties of laser-deposited superconducting thin films

Michael P. Siegal

Author Affiliations +

Proceedings Volume 1597, Progress in High-Temperature Superconducting Transistors and Other Devices II; (1992) https://doi.org/10.1117/12.2321836
Event: Microelectronic Processing Integration, 1991, San Jose, CA, United States

Abstract

The nature of evaporation/ablation characteristics during pulsed laser deposition strongly controls the quality of laser-deposited films. To understand the origin of particulates in laser deposited films, we have simulated the thermal history of YBa2Cu3O7 targets under intense nanosecond laser irradiation by numerically solving the heat flow equation with appropriate boundary conditions. During planar surface evaporation of the target material, the sub-surface temperatures were calculated to be higher than the surface temperatures. While the evaporating surface of the target is constantly being cooled due to the latent heat of vaporization, sub-surface superheating occurs due to the finite absorption depth of the laser beam. Sub—surface superheating was found to increase with decreasing absorption coefficient and thermal conductivity of the target, and with increasing energy density. The superheating may lead to sub—surface nucleation and growth of the gaseous phase which can expand rapidly leading to microexplosions and "volume expulsion" of material from the target. Experiments conducted by us and other research groups suggest a strong relation between degree of sub-surface superheating and particle density in laser—deposited films.

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Michael P. Siegal "Laser-target interactions and its effect in controlling properties of laser-deposited superconducting thin films", Proc. SPIE 1597, Progress in High-Temperature Superconducting Transistors and Other Devices II, (1 March 1992); https://doi.org/10.1117/12.2321836

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KEYWORDS

Absorption

Pulsed laser operation

Superconductors

Thin films

Laser irradiation

Particles

Pulsed laser deposition

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