HOE interferometer for cylindrical surface

Yoshitaka Minami; Kenji Yasuda

doi:10.1117/12.132180

20 October 1992 HOE interferometer for cylindrical surface

Yoshitaka Minami, Kenji Yasuda

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132180
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

We have developed a new HOE interferometer for testing cylindrical surfaces. The HOE is a reflection type and a plane mirror is used to compensate irregularity of HOE's surface. The grating pattern on the HOE was calculated by a computer. And the HOE was fabricated by an electron beam lithography system. This HOE acts as a diffraction element of cylindrical wave and also as a reflector of plane wave. The main frame of our HOE interferometer is a commercial Fizeau type interferometer. So operation is very easy.

Citation Download Citation

Yoshitaka Minami and Kenji Yasuda "HOE interferometer for cylindrical surface", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132180

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