Paper
12 February 1993 Experimental investigation of the scattering function outside the region of shift invariance
John G. Kepros, Eldon N. Okazaki, Linda C. Chin
Author Affiliations +
Abstract
Many analyses are found to be simpler in direction cosine coordinates. The analyses occasionally concern data obtained at angles far from specular. In order to avoid design error, the magnitude of the difference between transformed value and measured value must be known. Three Si discs (two uncoated and one coated with Al) were tested. All tests began with normal incidence. First, the sample was fixed and the detector was moved in 5.0 degree intervals about a vertical axis to measure reflective scatter. In the second test, the sample was simultaneously rotated about the same axis but in the opposite direction in order to yield 0.1 intervals in direction cosine coordinates. The data from the first test were transformed into direction cosine coordinates and compared. The transformed data began diverging significantly from the direct data at about 15.0 degrees. This report investigates the region of divergence.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John G. Kepros, Eldon N. Okazaki, and Linda C. Chin "Experimental investigation of the scattering function outside the region of shift invariance", Proc. SPIE 1753, Stray Radiation in Optical Systems II, (12 February 1993); https://doi.org/10.1117/12.140709
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KEYWORDS
Receivers

Scattering

Computing systems

Scatter measurement

Sensors

Reflectivity

Silicon

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