Multidetector photopolarimeters for industrial optical sensing and metrology

Rasheed M. A. Azzam

doi:10.1117/12.145544

28 May 1993 Multidetector photopolarimeters for industrial optical sensing and metrology

Rasheed M. A. Azzam

Author Affiliations +

Proceedings Volume 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing; (1993) https://doi.org/10.1117/12.145544
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

Considerable progress has been achieved recently in the development of new ellipsometric and polarimetry sensors that meet the requirements of an industrial environment. In particular, multidetector instruments, such as the four-detector photopolarimeter (FDP or Stokes meter), are particularly suited for fast, on-line, and real-time monitoring of industrial processes because of their simplicity, ruggedness, and absence of moving parts. We review some of these recent developments with reference to the semiconductor, steel-making, and optical- coating industries as examples.

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Rasheed M. A. Azzam "Multidetector photopolarimeters for industrial optical sensing and metrology", Proc. SPIE 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing, (28 May 1993); https://doi.org/10.1117/12.145544

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