Paper
23 March 1993 Coherence radar: an accurate 3D sensor for rough surfaces
Gerd Haeusler, Jochen Neumann
Author Affiliations +
Proceedings Volume 1822, Optics, Illumination, and Image Sensing for Machine Vision VII; (1993) https://doi.org/10.1117/12.141943
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States
Abstract
We introduce a 3-D sensor with extraordinary features. It supplies an accuracy which is only limited by the roughness of the object surface. This differs from other coherent sensors, where the depth accuracy is limited by the aperture of observation, when they are looking onto optically rough surfaces. As a consequence, our sensor supplies high accuracy, even with small aperture (we can look into narrow holes). The sensor supplies high distance accuracy at volume scatterers as well. The sensor is based essentially on a Michelson interferometer, with the rough object surface serving as one 'mirror'. This is possible because instead of the phase of the interferogram, only the occurrence of interference is detected, via small coherence of the source. We call the method 'coherence radar'.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gerd Haeusler and Jochen Neumann "Coherence radar: an accurate 3D sensor for rough surfaces", Proc. SPIE 1822, Optics, Illumination, and Image Sensing for Machine Vision VII, (23 March 1993); https://doi.org/10.1117/12.141943
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Cited by 10 scholarly publications.
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KEYWORDS
Sensors

Radar

Critical dimension metrology

Speckle

Ceramics

Aluminum

Light scattering

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