Thinned back-illuminated CCD for x-ray microscopy

Werner Meyer-Ilse; Thomas Wilhein; Peter Guttmann

doi:10.1117/12.148602

12 July 1993 Thinned back-illuminated CCD for x-ray microscopy

Werner Meyer-Ilse, Thomas Wilhein, Peter Guttmann

Proceedings Volume 1900, Charge-Coupled Devices and Solid State Optical Sensors III; (1993) https://doi.org/10.1117/12.148602
Event: IS&T/SPIE's Symposium on Electronic Imaging: Science and Technology, 1993, San Jose, CA, United States

Abstract

X-ray microscopy requires image detectors for soft x-rays (2.4 nm to 4.5 nm wavelength) with high detective quantum efficiency for a low radiation dosage applied to the sample. A thinned backside illuminated CCD has been attached to the Gottingen x-ray microscope, which is installed at the BESSY electron storage ring in Berlin. The CCD was a commercially available device with 1024 by 1024 pixels (each 24 micrometers square) without the anti-reflecting coating, which is applied to the standard device. First experiments performed at the primarily used x- ray wavelength of 2.4 nm show a considerable reduction of exposure time compared to the previously used photographic emulsion. This greatly reduces the radiation dose applied to the sample specimen. There was no degradation in performance of the CCD detected after one week of operation.

Citation Download Citation

Werner Meyer-Ilse, Thomas Wilhein, and Peter Guttmann "Thinned back-illuminated CCD for x-ray microscopy", Proc. SPIE 1900, Charge-Coupled Devices and Solid State Optical Sensors III, (12 July 1993); https://doi.org/10.1117/12.148602

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