New compensating 4-phase-algorithm for phase shifting interferometry

J. Schwider

doi:10.1117/12.2308719

23 July 1993 New compensating 4-phase-algorithm for phase shifting interferometry

J. Schwider

Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 19838C (1993) https://doi.org/10.1117/12.2308719
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary

Abstract

Phase shifting interferometry (PSI) is the most often used method in automated interferometry. An essential procedural step of this technique is the unwrapping of the phase. The phase shifting algorithm ill

Citation Download Citation

J. Schwider "New compensating 4-phase-algorithm for phase shifting interferometry", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 19838C (23 July 1993); https://doi.org/10.1117/12.2308719

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