Computer simulation of electron optical characteristics of accelerating tube for high-voltage electron microscope

Toshimi Ohye; Chiaki Morita; Hiroshi Shimoyama

doi:10.1117/12.155700

3 September 1993 Computer simulation of electron optical characteristics of accelerating tube for high-voltage electron microscope

Toshimi Ohye, Chiaki Morita, Hiroshi Shimoyama

Author Affiliations +

Proceedings Volume 2014, Charged-Particle Optics; (1993) https://doi.org/10.1117/12.155700
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Numerical calculations were conducted on the electron optical characteristics of the accelerating tube (AT) for the high voltage electron microscope. The emitted electrons are firstly accelerated to V₀ by the TE gun or the FE gun and finally to V_a by the AT which consists of 34 electrodes with the inner diameter of 33 mm and has the overall length of 1423 mm. The AT is treated as a thick electrostatic accelerating lens. Several electron optical problems arising from a combination of the AT with a thermionic emission (TE) gun or a field emission (FE) gun are studied. For the TE gun the aberration effect of the AT lens is found to be safely neglected for any combination of Va and V₀. In the case of the FE gun, on the other hand, the aberration effect of the AT lens can not be neglected and deteriorates the brightness of the beam. This situation can be overcome by placing an electron lens between the FE gun and the AT.

Citation Download Citation

Toshimi Ohye, Chiaki Morita, and Hiroshi Shimoyama "Computer simulation of electron optical characteristics of accelerating tube for high-voltage electron microscope", Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); https://doi.org/10.1117/12.155700

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