Optical and physical properties of composite films prepared by co-evaporation of TiO2 and MgF2

Rung-Ywan Tsai; Chaur-Tsang Wei; Fang Chung Ho

doi:10.1117/12.163548

2 November 1993 Optical and structural properties of composite films prepared by co-evaporation of TiO₂ and MgF₂

Rung-Ywan Tsai, Chaur-Tsang Wei, Fang Chung Ho

Proceedings Volume 2046, Inhomogeneous and Quasi-Inhomogeneous Optical Coatings; (1993) https://doi.org/10.1117/12.163548
Event: Optics Quebec, 1993, Quebec City, Canada

Abstract

The optical and structural properties of TiO₂-MgF₂ mixed films prepared by coevaporation with ion-assisted deposition have been investigated. The composition of coevaporated TiO₂-MgF₂ mixed films can be tuned by controlling the relative deposition rates of the two sources. Most of the films with thicknesses less than 500 nm are found to be homogeneous in optical properties. The optical and structural properties of the mixed films change from MgF₂-dominant to TiO₂-dominant as the TiO₂ content in the mixed film increases. The dependence of the refractive index with composition can be fitted by Bottcher's formula at low TiO₂ content and by Lorentz-Lorentz formula at high TiO₂ content in the mixed films. An application of TiO₂-MgF₂ mixed films for the design and fabrication of antireflection coatings in the near infrared region has also been discussed.

Citation Download Citation

Rung-Ywan Tsai, Chaur-Tsang Wei, and Fang Chung Ho "Optical and structural properties of composite films prepared by co-evaporation of TiO₂ and MgF₂", Proc. SPIE 2046, Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, (2 November 1993); https://doi.org/10.1117/12.163548

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