New interferometric profiler for smooth and rough surfaces

Paul J. Caber; Stephen J. Martinek; Robert J. Niemann

doi:10.1117/12.168073

1 February 1993 New interferometric profiler for smooth and rough surfaces

Paul J. Caber, Stephen J. Martinek, Robert J. Niemann

Proceedings Volume 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application; (1993) https://doi.org/10.1117/12.168073
Event: Laser Dimensional Metrology: Recent Advances for Industrial Application, 1993, Brighton, United Kingdom

Abstract

A new method of optical, non-contact profiling of rough surfaces is described that utilizes interferometric techniques as well as digital signal processing algorithms to produce fast, accurate, repeatable 3-D surface profile measurements. When combined with more traditional phase-shifting measurement techniques, this produces an instrument capable of profiling surfaces with rms roughness, Rq, ranging from 1 angstrom to 20 micrometers , and measurement of steps up to 100 micrometers . Sample data are discussed and a comparison with other surface profiling techniques is presented.

Citation Download Citation

Paul J. Caber, Stephen J. Martinek, and Robert J. Niemann "New interferometric profiler for smooth and rough surfaces", Proc. SPIE 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application, (1 February 1993); https://doi.org/10.1117/12.168073

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