Novel method for measuring the step with heterodyne interferometer

Huijie Zhao; Pengsheng Li; Xifu Qiang; Hua Li

doi:10.1117/12.156334

22 September 1993 Novel method for measuring the step with heterodyne interferometer

Huijie Zhao, Pengsheng Li, Xifu Qiang, Hua Li

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156334
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

A noval method for measuring the width and height. ( A/2 )of the step is introduced which uses laser heterodyne interferometer. Precise phase measurement techniques are used and the phase function during light spot passes through the step edge is gotten. Besides the step response of the interferometer is analyzed. This instrument has high resolution large scope and high positioning accuracy.

Citation Download Citation

Huijie Zhao, Pengsheng Li, Xifu Qiang, and Hua Li "Novel method for measuring the step with heterodyne interferometer", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156334

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