Optical vibration measurement of mechatronics devices

Shigeo Yanabe

doi:10.1117/12.156346

22 September 1993 Optical vibration measurement of mechatronics devices

Shigeo Yanabe

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156346
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

An optical vibration measuring system which enables to detect both linear and angular displacement of 25 nm and 5 prad was developed. The system is mainly composed of a He-Ne laser, a displacement detecting photo-diode and lenses, and has linear and angular displacement magnification mechanism using two different principles of optical lever. The system was applied to measure vibrational characteristics of magnetic head slider of hard disk drives and to measure stator teeth driving velocities of ultrasonic motor.

Citation Download Citation

Shigeo Yanabe "Optical vibration measurement of mechatronics devices", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156346

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